| 摘要 |
PURPOSE:To lessen the burden of an optical microscope when a focus is to be met thereby to enhance the analyzing efficiency, by providing an automatic focusing device for the optical microscope so as to adjust the position of a sample. CONSTITUTION:An automatic focusing device 7 is installed in an optical microscope 6. A sample stage 2 is moved up and down by a Z-direction (height direction) sample stage driving device 9 via a control circuit 10 in accordance with outputs of the device 7. The stage 2 moves the sample 3 on a Rowland circle a wavelength dispersion type X-ray detecting device 12 so that the distance from a spectral crystal becomes equal to that from an X-ray detector 4. Characteristic X-rays are generated from the sample 3 by an electronic probe from an electron projecting system 1, diffracted by the spectral crystal 11 and collected by the X-ray detector 4. |
