| 摘要 |
<p>PURPOSE: To simplify the structure and manufacture of a microvalve by forming a lamination of layers, uppermost and lowermost layers are each formed with a plurality of openings and a middle layer is formed with a flat sliding surface with a plurality of through openings. CONSTITUTION: The microvalve is formed from a plurality of layers 1 to 3, which are connected each other via a plurality of intermediate layers 4 and 5. A first and third layers 1 and 3 are each formed with two return connectors T1 and T2, two working connectors A and B and one additional connector P. In the second layer 2, at least one flat slide valve 20 displaceable on the layer surface and having at least two through openings 24 and 25 is structured to form an electrostatically operable means. Each two of the return connectors T1 and T2, working connectors A and B and additional connectors P located opposite in the first and third layers 1 and 3 are connected to each other selectively in accordance with the displacement of the flat slide valve 20 to its rest or opposite position.</p> |
