| 摘要 |
PURPOSE:To provide a conveying robot which reduces an arm operation range and reduces the size of a work conveyance passage and a vacuum processing device incorporating the conveying robot. CONSTITUTION:A process chamber 11 is communicated to a robot chamber 14 through a conveyance passage 12 and a conveyance passage 12 is provided with a gate valve 13. A conveying robot 15 is installed in the robot chamber 14 and a substrate 16 is taken out from a substrate cassette 17 to convey the substrate to the process chamber 11 through the conveyance passage 12. Operation to convey the substrate by means of the conveying robot 15 is effected through rotation of first, second, and third arms 20, 21, and 22. The second arm 21 inserted in the conveyance passage 12 is curved in an arcuate shape and the occupied region of rotation operation is reduced in width. |
