| 摘要 |
PURPOSE:To enable a discharge product to be discharged outside a location near a discharge portion and a stable pulse discharge to be performed repeatedly by branching from an input/output path near a discharge side of a gas laser medium at a main discharge electrode toward a discharging direction and at the same time forming a discharge path so that it merges circulation. CONSTITUTION:A gas laser medium which flows toward a discharge portion is divided into two parts, namely those passing an input/output path 30 along guide bodies 22 and 23 and those flowing to first paths 28a and 28b after entering through flow entrances 29a and 29b. Flow is rapid since the flow entrances 29a and 29b are wide and the flow is constricted inside in the first flow paths 28a and 28b, thus enabling a flow which is suctioned to a side of the first paths 28a and 28b to be generated at second paths 30a and 30b. The sucked gas merges the gas laser medium passing the discharge portion at a circulation flow path again. |
