| 摘要 |
A measuring and test system is used with a probe tip. The field emission or tunnel effect is exploited. The probe tip (1) is guided towards the reference surface (2) to a distance in the range 0.1 to 100 nm. A voltage in the range 1mV to 1000V is applied between the probe tip and reference surface and the current flowing between them is measured and evaluated. The measuring arrangement and the probe with the reference surface are coupled to a vibration damping system. The measuring arrangement consists of a spindle (7), an assembly converting the spindle drive into linear movement, a two-stage piezo drive (10,11) and the tip (1). USE/ADVANTAGE - Spacing sensor for laser-raster microscopy and optical near field microscopy, esp. for investigating micro and opto-electronic structures. Examining profiles of microstructures produced to a plan and surface roughness, e.g. resulting from processing. Accurate following through of working process, including ultra-precision processing. |
