Gas transport by surface diffusion - through narrow passages in solid body, esp. for atomic oxygen@ prodn.

摘要

(A) Transport of gases and/or gas molecule fragments, esp. saturated gas molecule fragments, is effected by adsorbing and dissociating gas on an inert solid body having passages of cross-sectional area selected such that transport of the fragments occurs exclusively by diffusion along the passage surfaces. (B) Appts. for gas transport from a first chamber to a second chamber, by the surface diffusion process (A), is also claimed. (C) Also claimed are processes, similar to process (A), for gas (molecular fragment) transport and gas (molecular fragment) loading of surfaces, in which the solid body is heated. USE/ADVANTAGE - The processes are esp. useful for providing a source of oxygen by O2 dissociation, adsorption, transport and desorption. Controllable selective transport of gas molecules or their fragments, exclusively by surface diffusion, is achieved to allow gas sepn. from gas mixts. or carrier gases.