| 摘要 |
PURPOSE:To reduce misconfirmation due to irregularity at the time of the formation of a pattern and to classify the kind of a detected flaw. CONSTITUTION:An edge detection circuit 11 sets a memory part wherein the change rate of the signals in two image memories 7a,7b is an indicated value or more to an edge part and a comparison circuit 8 calculates the difference between two image memories. An edge removing circuit 12 removes the edge part calculated by the edge detection circuit from the comparison result. A judging circuit 13 detects a flaw from this result. |
