| 摘要 |
PURPOSE:To increase the SOR output power by improving the transmittance of the window for SOR light emission in a SOR device. CONSTITUTION:At an end of a light take-out line 26, a beryllium window 44 which has narrow vertical width, thin plate and high transmittance is installed. Outside the beryllium window 44, a cavity 48 is connected. In the cavity 48, an ablique incidence mirror 30 capable of swinging vretically is provided to deflect SOR light 29 in vertical direction and assure a necessary expoosure area in vertical direction. At the end of the cavity 48, an X-ray mask membrane window 76 which is made of an X-ray mask base material, is much thinner than the beryllium window 44 and does not influence the transmittance, is fixed to let SOR light emit and expose the exposure object 78. In the cavity 48, He gas 80 with lower pressure than the atmosphere is sent to cool the beryllium window 44 and to reduce the pressure on the X-ray mask membrane window 76. |
