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发明名称
HEIGHT-MEASURING DEVICE
摘要
申请公布号
JPH04282405(A)
申请公布日期
1992.10.07
申请号
JP19910046320
申请日期
1991.03.12
申请人
NEC CORP
发明人
KINOSHITA MASAO
分类号
G01B11/14;G01B11/00;H01L21/66
主分类号
G01B11/14
代理机构
代理人
主权项
地址
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