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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04280684(A)
申请公布日期
1992.10.06
申请号
JP19910043560
申请日期
1991.03.08
申请人
HITACHI LTD
发明人
SHIBA KAZUYOSHI
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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