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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04280455(A)
申请公布日期
1992.10.06
申请号
JP19910043391
申请日期
1991.03.08
申请人
NKK CORP
发明人
TATEISHI MASAHIRO;TAKAHASHI TAKAO
分类号
H01L21/30;C22C38/00;H01L21/3205;H01L21/768
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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