摘要 |
An optical waveguide device comprises a low refractive index layer having a refractive index nb, a core layer having a refractive index nc (where nc > nb) and a cladding layer having a refractive index nCl (where nCl < nc) formed on a substrate. Thermal expansion coefficients of the low refractive index layer, the core layer and the cladding layers, respectively, are made substantially equal to each other at respective boundaries. |