GAS CONTROL DEVICE FOR LOAD LOCK CHAMBER OF VERTICAL TYPE DIFUSION CVD DEVICE,申请号JP19910069164-传众专利搜索

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发明名称	GAS CONTROL DEVICE FOR LOAD LOCK CHAMBER OF VERTICAL TYPE DIFUSION CVD DEVICE
摘要
申请公布号	JPH04280625(A)	申请公布日期	1992.10.06
申请号	JP19910069164	申请日期	1991.03.08
申请人	KOKUSAI ELECTRIC CO LTD	发明人	TANABE MIKIO;TAKAHASHI HIROSHI
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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