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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH04280456(A)
申请公布日期
1992.10.06
申请号
JP19910042127
申请日期
1991.03.08
申请人
FUJITSU LTD
发明人
SHIRASAKI MASAHIRO
分类号
H01L21/285;H01L21/768
主分类号
H01L21/285
代理机构
代理人
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地址
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