| 摘要 |
<p>PURPOSE:To readily obtain a high-purity He gas by connecting a pressure swing absorption (PSA) device and a separation device to a gas bag, and after compressing an impurity gas in the bag, feeding the impurity gas into a separating film device, etc., and making it possible to removing water content and the impurity. CONSTITUTION:He gas recovered through a HE recovering line 10 is introduced into a gas bag 12 having inner pressure kept in a definite state. The above- mentioned recovered He gas is compressed by a purification compressor 22 and then fed to both of a separating film device 34 and a freezer 26. He gas fed to the freezer 26, removed water content and dried, is introduced into a pressure swing absorption device (PSA device) 30, where oxygen, nitrogen and the impurity are removed to afford a high-purity He gas. The He gas is then introduced into a liquefying device 40 top liquefy the He gas. On the one hand, in He gas fed to the separating film device 34, only the impurity components are concentrasted and discharged out of the system and the gas enriched in He is returned through a line 38 into the gas bag 12 and repurified.</p> |
