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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH04279022(A)
申请公布日期
1992.10.05
申请号
JP19910000600
申请日期
1991.01.08
申请人
NEC CORP
发明人
OSHITA YOSHIO
分类号
C30B25/02;C30B25/10;C30B25/12;C30B25/14;H01L21/205;H01L21/285;H01L21/31
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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