| 摘要 |
PURPOSE:To read information without a detector of an electron beam arranged in a vacuum system by forming a thermally fusible nonconductive layer on a conductive layer. CONSTITUTION:An electron beam 24 having spot diameter 500Angstrom is accelerated to 50keV and is irradiated to an EB disc 21 for information recording in a vacuum of about 10<-3> pascals (Pa) to fuse locally a cellulose acetate layer 23 in the irradiated area to form an aperture part 25, thus writing information. Next, a relatively weak electron beam 30 having, for example, a 1/10 strength of said irradiated beam is irradiated. Electrons are flowed through an Al conductive layer 22 in the aperture part 25, and therefore, presence/absence of the current is detected by a current detector 33 connected to the Al conductive layer 22 of the EB disc 21 to read information. |
