OPTICALLY PATTERNED RF SHIELD FOR AN INTEGRATED CIRCUIT CHIP FOR ANALOG AND/OR DIGITAL OPERATION AT MICROWAVE FREQUENCIES

摘要

35-EL-1798 AN OPTICALLY PATTERNED RF SHIELD FOR AN INTEGRATED CIRCUIT CHIP FOR ANALOG AND/OR DIGITAL OPERATION AT MICROWAVE FREQUENCIES The invention relates to the provision of an RF shield for an individual or a collection of integrated circuit chips in a module containing a plurality of hybrid interconnected chips generating interfering RF fields that would interfere with operation of that chip if unshielded. The chips in the module may function in the analog and/or digital mode. The RF shield comprises separate metallizations under and over the chip, the two metallizations being interconnected by a line of discrete electrically conductive vias forming cage-like sides to complete an electrically conductive enclosure about the chip. The vias are spaced closely enough to prevent the escape or entry of RF waves at the frequencies of interest. The RF shield is advantageously fabricated using metallizations and vias that are optically patterned by the same process steps used to effect hybrid interconnection of the chips.