发明名称 CONVECTION TRANSFER SYSTEM
摘要 A system provides convective transfer from a workpiece (10) to a flowing fluid. A gap (16) is formed between the workpiece (10) and a facesheet (12) containing fluid supply nozzles (18) and fluid return nozzles (20). The fluid is fed to the supply nozzles (18), travels a short distance within the gap (16) adjacent to the facesheet (12), and exits via return nozzles (20). The flow cross section and flow density facilitate heat transfer at a moderate flow rate and low fluid pressure. The system is also applicable for chemical transfer such as plating or etching printed circuit boards and for transfer through a semi-permeable membrane. <IMAGE> <IMAGE>
申请公布号 EP0453786(A3) 申请公布日期 1992.09.30
申请号 EP19910104665 申请日期 1991.03.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZINGHER, ARTHUR R.
分类号 C23F1/08;C25D21/10;F28D21/00;F28F13/02;F28F23/00;H01L21/302;H01L21/3065;H01L23/44;H01L23/473;H01M8/02;H05K3/00;H05K3/06;H05K3/18 主分类号 C23F1/08
代理机构 代理人
主权项
地址