发明名称 |
CONVECTION TRANSFER SYSTEM |
摘要 |
A system provides convective transfer from a workpiece (10) to a flowing fluid. A gap (16) is formed between the workpiece (10) and a facesheet (12) containing fluid supply nozzles (18) and fluid return nozzles (20). The fluid is fed to the supply nozzles (18), travels a short distance within the gap (16) adjacent to the facesheet (12), and exits via return nozzles (20). The flow cross section and flow density facilitate heat transfer at a moderate flow rate and low fluid pressure. The system is also applicable for chemical transfer such as plating or etching printed circuit boards and for transfer through a semi-permeable membrane. <IMAGE> <IMAGE> |
申请公布号 |
EP0453786(A3) |
申请公布日期 |
1992.09.30 |
申请号 |
EP19910104665 |
申请日期 |
1991.03.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ZINGHER, ARTHUR R. |
分类号 |
C23F1/08;C25D21/10;F28D21/00;F28F13/02;F28F23/00;H01L21/302;H01L21/3065;H01L23/44;H01L23/473;H01M8/02;H05K3/00;H05K3/06;H05K3/18 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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