发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 PURPOSE:To decrease mask processes at the time of production, and to increase resistance against radiation by combining a split-word line type static random access memory (SRAM) and a thin-film transistor load type SRAM. CONSTITUTION:Two word lines WL and WL are connected respectively in each transfer transistor. Each thin-film transistor load is composed of a drain region 65 and a source region 66 or a drain region 68 and a source region 69 arranged while holding the channel region 67 or 70 of a semiconductor film and gate electrodes, which are insulated from the channel regions and disposed oppositely. Drains are connected to one impurity region of the thin-film transistor load through a pair contact sections 63 and 64 having the same structure respectively in each driver-transistor at that time, and each driver-transistor is connected to the gate electrode of the driver-transistor of the opposite party.
申请公布号 JPH04274363(A) 申请公布日期 1992.09.30
申请号 JP19910078719 申请日期 1991.03.01
申请人 FUJITSU LTD 发明人 ITABASHI KAZUO;EMA TAIJI
分类号 H01L27/11;H01L21/8244;H01L29/78;H01L29/786 主分类号 H01L27/11
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