CIRCUIT ARRANGEMENT FOR NON-CONTACT MEASUREMENT OF THE OHMIC RESISTANCE OF THIN LAYERS,申请号GB19890009488-传众专利搜索

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发明名称	CIRCUIT ARRANGEMENT FOR NON-CONTACT MEASUREMENT OF THE OHMIC RESISTANCE OF THIN LAYERS
摘要
申请公布号	GB2217860(B)	申请公布日期	1992.09.30
申请号	GB19890009488	申请日期	1989.04.26
申请人	* LEYBOLD AKTIENGESELLSCHAFT	发明人	GERNOT * THORN
分类号	G01R27/02	主分类号	G01R27/02
代理机构		代理人
主权项
地址

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