MANUFACTURE OF SILICON DIAPHRAGM,申请号JP19910035942-传众专利搜索

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发明名称	MANUFACTURE OF SILICON DIAPHRAGM
摘要
申请公布号	JPH04274372(A)	申请公布日期	1992.09.30
申请号	JP19910035942	申请日期	1991.03.01
申请人	YOKOGAWA ELECTRIC CORP	发明人	ISHIGURO HIROSHI
分类号	H01L29/84	主分类号	H01L29/84
代理机构		代理人
主权项
地址

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