发明名称 ALIGNMENT DEVICE FOR MICROWORKS FOR ALIGNMENT THEREOF
摘要 <p>PURPOSE:To simply control tilted movement of an alignment jig and movement of microworks by tiltedly arranging an alignment jig mounted on the periphery of a work pool jig for being turned integrally with the work pool jig. CONSTITUTION:An alignment jig 3 is tiltedly arranged by expanding an expansion member 7 around a work pool jig 2. A motor 4 is turned to turn the work jig 2 together with a turn table 6 by compressing the expansion member 7 for tiltedly moving it with an axis 31 as center. In company therewith, centrifugal force acts on the microworks 1 supplied to the work pool jig 2 so as to be moved outside in a state of being pressed on the tilted surface of the alignment jig 3. When turning of the motor 4 is raised, each alignment jig 3 completely compresses the expansion member 7 so as to be horizontal and microworks 1 fall into a housing recessed part 33 so as to be arrayed.</p>
申请公布号 JPH04274342(A) 申请公布日期 1992.09.30
申请号 JP19910059436 申请日期 1991.02.28
申请人 NEC KANSAI LTD 发明人 TANAKA MICHIO
分类号 H01L21/68;B65G47/14 主分类号 H01L21/68
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