发明名称 |
Surface potential measuring system |
摘要 |
In a system for measuring a surface potential of a sample, a probe is located above. A surface of the sample with a small gap and is vibrated by a piezoelectronic element which is energized by a oscillator. A potential of the distal end of the probe is changed and is converted into an electrical signal. The surface potential is obtained from the electrical signal.
|
申请公布号 |
US5151659(A) |
申请公布日期 |
1992.09.29 |
申请号 |
US19900515419 |
申请日期 |
1990.04.27 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
TANAKA, KUNIYOSHI;SHIROUZU, SHUNJI;OHTA, MINORU;MIYAGAWA, HIDEO |
分类号 |
G01N27/00;G01N27/60 |
主分类号 |
G01N27/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|