| 摘要 |
The present invention develops a process wherein a method for fabrication of field emission tips for flat panel displays and in particular to the formation of an array of self-aligned emission cathode tips. The method forms self-aligned ultra-sharp cathode tips out of a conducting material by etching contacts into an insulator which encloses a grid of conducting lines which will serve as the anodes. Next, a film having poor step coverage is deposited into the contacts followed by a selective deposition of a conducting material thereby resulting in a cone shaped configuration. Then the film is etched selective to the cone followed by the sharpening of the cone tip by conventional methods, thereby resulting in an array of evenly-spaced self-aligned emission cathodes having ultra-sharp tips.
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