发明名称 Process for manufacturing an optical recording medium
摘要 A method of depositing the layers of an optical recording medium to their requisite thicknesses is disclosed in which optical monitoring of the reflectivity of a first dielectric layer during deposition is used to determine the deposition rate. The reflectivity is monitored to determine the time period in which the reflectivity reaches a maximum or minimum value, which occurs when the layer is a quarter wave thick. The deposition rate is derived from that time period, and the deposition is continued for a time in accordance with the deposition rate until the requisite thickness of the first dielectric layer is obtained. The second dielectric layer is deposited for a lesser time period in accordance with the deposition rate which has been optically derived during deposition of the first dielectric layer.
申请公布号 US5151295(A) 申请公布日期 1992.09.29
申请号 US19900599692 申请日期 1990.10.18
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 KAWAHARA, KATSUMI;UCHIDA, MASAMI;YOSHIOKA, KAZUMI;OHTA, TAKEO;HORAI, KEIICHIRO
分类号 G01B11/06;G11B7/26 主分类号 G01B11/06
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