SURFACE CHANGE INHIBITION METHOD IN SOLID STATE SURFACE OBSERVATION AND ANALYSIS IN ATMOSPHERIC PRESSURE AND DEVICE THEREOF,申请号JP19910053502-传众专利搜索

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发明名称	SURFACE CHANGE INHIBITION METHOD IN SOLID STATE SURFACE OBSERVATION AND ANALYSIS IN ATMOSPHERIC PRESSURE AND DEVICE THEREOF
摘要
申请公布号	JPH04273141(A)	申请公布日期	1992.09.29
申请号	JP19910053502	申请日期	1991.02.27
申请人	NEC CORP	发明人	OOTA NAHOMI
分类号	H01L21/66;G01Q30/08;G01Q30/12;G01Q30/20;G01Q60/10;G01Q60/24	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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