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发明名称
SEMICONDUCTOR INTEGRATED DEVICE
摘要
申请公布号
KR920008417(B1)
申请公布日期
1992.09.28
申请号
KR19840006921
申请日期
1984.11.05
申请人
HITACHI LTD.
发明人
GUBOGI, SHIGEO;MAESHIMA, HITEO;MASUDA, IGUROU
分类号
G01R31/26;G01R31/28;G01R31/3185;G06F11/267;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
G01R31/26
代理机构
代理人
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地址
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