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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04271123(A)
申请公布日期
1992.09.28
申请号
JP19910032925
申请日期
1991.02.27
申请人
SANYO ELECTRIC CO LTD
发明人
MATSUDA JUNICHI;OTA YUTAKA
分类号
H01L21/265;H01L21/316;H01L21/76
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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