| 摘要 |
<p>PURPOSE:To perform parallel and accurate lamination of substrates by roughly aligning upper and lower tapes attracting and holding plural substrates having aligning marks, then precisely aligning the substrates with sensing means of an optical system and bringing the substrates into close contact. CONSTITUTION:The first transparent substrate 1 having a drawn pattern is fed onto the first table 32 and the second substrate 4 is also fed onto the second table 34. The aforementioned tables 32 and 34 are moved by respective uniaxial direct advance driving means, and marks (1A) drawn on the substrate 1 are aligned with marks (4A) drawn on the substrate 4. The aligned marks (1A) and (4A) are then sensed with sensing means 48 composed of an optical system and further precisely subjected to micro-aligning. After completing the aligning, the substrates 1 and 4 are subsequently brought into close contact with a close contact means 45. The substrates 1 and 4 in close contact are then contact bonded with a contact bonding means 49 under a prescribed pressure.</p> |
