发明名称 STORAGE CONTAINER
摘要 PURPOSE:To allow the washing away and removing of the stains sticking to the surfaces of reticules in particular with the storage container for storing the materials to be stored, such as reticules and masks. CONSTITUTION:The storage container is constituted by including a container body 21 which has a freely openable and closable door 21a and houses and stores the materials 11 to be stored, a spraying means 31 which atomizes a supplied liquid 14 to a misty form and sprays this liquid into the container body 21 storing the materials 11 to be stored and a discharge means 33 for discharging the liquid 14 accumulated in the container body 21.
申请公布号 JPH04269751(A) 申请公布日期 1992.09.25
申请号 JP19910030538 申请日期 1991.02.26
申请人 FUJITSU LTD 发明人 OHORI KAZUO
分类号 G03F1/82;H01L21/027;H01L21/30;H01L21/673;H01L21/68 主分类号 G03F1/82
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