| 摘要 |
PURPOSE:To provide a VPS soldering apparatus having structure using single heating solvent and preventing the solvent from disappearing with gasifying. CONSTITUTION:A heating chamber 11 constituted so as to mount a material to be treated on a carrier 1, pass this through a first cooling chamber 10 having inlet with a first shutter 13 and communicating with a heating chamber 11 with a second shutter 14, and communicate with a second cooling chamber 12 with the second shutter 14 and a third shutter 15, provides a heater 4 and carbon fluoride 5 at the bottom part. After executing the soldering by hanging down the material to be treated mounted on the carrier 1 into vapor of the solvent 5 formed with heating of a heater 4, the carrier 1 is pulled up and conveyed to the second cooling chamber 12 and the cooled material to be treated is carried out to the outer part from a fourth shutter 16. |
