METHOD FOR INSPECTING PERIODIC PATTERN,申请号JP19910030404-传众专利搜索

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发明名称	METHOD FOR INSPECTING PERIODIC PATTERN
摘要
申请公布号	JPH04269610(A)	申请公布日期	1992.09.25
申请号	JP19910030404	申请日期	1991.02.25
申请人	TOSHIBA CORP	发明人	MIYATA YUKITAKA
分类号	G01B11/24;G01N21/88;G01N21/958;G02F1/13;H04N17/04	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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