发明名称 MANUFACTURE OF MEMORY CELL OF STATIC RAM
摘要 PURPOSE:To improve reliability of static RAM by generating dislocation to a grounded source diffused region of a static RAM to get out contamination substances and crystal defects within a storing node diffused layer region. CONSTITUTION:On the occasion of forming source diffused regions 11, 12 to be grounded to storing node diffused layer regions 13, 14 in manufacture of a memory cell 1 of a static RAM, dislocation is generated only in the grounded source diffused layer regions 11, 12 and thereafter contamination substance and crystal defect in the storing node diffused layer regions 13, 14 are got out by the dislocation generated in the source diffused layer regions 11, 12.
申请公布号 JPH04267560(A) 申请公布日期 1992.09.24
申请号 JP19910050471 申请日期 1991.02.22
申请人 SONY CORP 发明人 OKAMOTO YUTAKA
分类号 H01L21/322;H01L21/8244;H01L27/11 主分类号 H01L21/322
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