| 摘要 |
The conduit system of a laser oscillator (1) includes pipes (211,212,213,214) for circulating a medium gas to a laser discharge tube (11). A medium gas circulation pump (23) is provided in the pipes which are coupled to medium gas supply pipes (217,218). A pump (24) driven by a unit discharges the medium gas from the laser discharge tube and the medium gas circulation pipes. A controller (7) for the operation of the conduit system generates signals for the pump drive unit and a display device (6). When a switch valve (26) in the medium gas pipe is closed and the discharge pump (24) is driven, any abnormal condition in the conduit system may be detected and displayed based upon whether the operation signal of a pressure sensor (3) is generated within a predetermined period of time or not.
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