发明名称 PRODUCTION MANAGEMENT SYSTEM
摘要 PURPOSE:To automatically indicate supply in accordance with the fluctuation of the number of completed products by gathering production actual result information of each process and using this information for supply indication of parts, materials, or jigs with respect to a production line where the quantity of products is varied in accordance with the advance of processes. CONSTITUTION:An automatic warehouse 60 on a semiconductor production line preserves and supplies masks. An information processor 50 manages stocking and discharging of the automatic warehouse 60. A production actual result information input terminal 31 or the like is installed in each of processes 21, etc., and information processors 30, 31, etc., are connected by a transmission line 11. A form mask DB 41, a process DB 42, a mask DB 43, and a commencement DB 44 are generated on a central information processing unit 30. A worker inputs production actual result information at the time of carrying a wafer from an arbitrary process to the just succeeding process. The central information processing unit 30 refers to the process DB 42 to update the commencement DB 44 based on received information. Thus, mask supply indicating information is generated and is transmitted to an automatic warehouse control terminal 50.
申请公布号 JPH04268667(A) 申请公布日期 1992.09.24
申请号 JP19910029826 申请日期 1991.02.25
申请人 HITACHI LTD 发明人 UCHIDA HIDEKI;OKAZAKI MAKOTO;FUJISHIRO TOMOHIRO
分类号 B23Q41/08;B65G61/00;G05B15/02;G05B19/418;G06Q50/00;G06Q50/04;H01L21/02 主分类号 B23Q41/08
代理机构 代理人
主权项
地址