| 发明名称 |
EXHAUST GAS TREATMENT APPARATUS |
| 摘要 |
<p>PURPOSE:To perfectly make the hydride gas from a growing furnace or MOMBE apparatus harmless. CONSTITUTION:In an exhaust gas treatment apparatus wherein an MOMBE apparatus 1, an oil rotary pump 2, a mist trap 11, a hydride adsorbing cylinder 4 or 5 are connected in series, the mist trap 11 is packed with a hydride adsorbent.</p> |
| 申请公布号 |
JPH04267925(A) |
申请公布日期 |
1992.09.24 |
| 申请号 |
JP19910053356 |
申请日期 |
1991.02.25 |
| 申请人 |
NIPPON TELEGR & TELEPH CORP <NTT> |
发明人 |
SUGIURA HIDEO;YAMADA TAKESHI;IGA RYUZO |
| 分类号 |
B01D53/04;B01D53/34;B01D53/46;B01D53/81;H01L21/203;H01L21/205 |
主分类号 |
B01D53/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
