Specimen holder for use in a charged particle beam device.

摘要

A specimen holder for use in a charged particle beam device, notably an electron microscope, comprises a support (21) and a resilient retaining element (25). The retaining element comprises a resilient ring which can be detached from the support or resilient tags (31) which are attached to the support. A specimen is pressed against the support by the resilient retaining element. Such retaining of the specimen offers the advantage that the specimen can be readily disposed on the comparatively thin support and can be simply detached therefrom with a minimum risk of damaging. <IMAGE>