发明名称 |
Photosensitive polymer composition. |
摘要 |
<p>A photosensitive polymer composition comprising, in admixture, a polymer predominantly comprising a recurring unit of the formula ( I ): <CHEM> wherein X is a tri- or tetravalent organic group, Y is a divalent organic group, and n is equal to 1 or 2 and a compound having a urea bond of the formula ( II ): <CHEM> wherein R<1> is a group having a functional group capable of forming a dimer or polymer upon exposure to radiation, R<2> and R<3> are independently a hydrogen atom or a monovalent organic group is shelf stable and applicable as relatively thick coatings having sufficient photosensitivity to form semiconductor element surface protective films.</p> |
申请公布号 |
EP0505161(A1) |
申请公布日期 |
1992.09.23 |
申请号 |
EP19920302326 |
申请日期 |
1992.03.18 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
OKINOSHIMA, HIROSHIGE;KATO, HIDETO |
分类号 |
C08K5/21;C08F283/04;C08L79/08;C09D179/08;G02F1/1337;G03F7/027;G03F7/037;G03F7/038;G03F7/075;H01L21/312 |
主分类号 |
C08K5/21 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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