Speed stabilised positive-acting photoresist compositions.

摘要

A positive-acting photoresist comprising in one or more layers (i) a resin binder, (ii) a photo-acid generator, and (iii) an acid-cleavable compound, characterised in that the photoresist medium further comprises as a speed stabilising agent one or more compounds having a nucleus of general formula (I): <CHEM> in which; R represents a hydrogen atom or an optionally substituted alkyl group comprising up to 10 carbon atoms.