发明名称 |
HEAT-SENSITIVE FLOW SENSOR |
摘要 |
In a heat-sensitive flow sensor including a bridge circuit composed of a heat-sensitive resistor formed on a substrate provided within a fluid flow passage and a plurality of resistors and a control circuit for controlling current supplied to the heat-sensitive resistor to maintain the bridge circuit in a thermally balanced condition, a flow rate being detected from the thermal balance condition of the bridge circuit, current supply leads and a base portion of the substrate are buried in a heat insulating support member supported by a base. Preferably, lead terminals of the heat-sensitive resistor formed on the base portion are also buried in the heat insulating support member.
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申请公布号 |
US5148707(A) |
申请公布日期 |
1992.09.22 |
申请号 |
US19900560958 |
申请日期 |
1990.08.01 |
申请人 |
MITSUBISHI DENKI K.K. |
发明人 |
INADA, MASANORI;OHTANI, HICHIRO |
分类号 |
G01F1/68;G01F1/684;G01F1/692;G01P5/12 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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