发明名称 |
Apparatus for aligning wafers within a semiconductor wafer cassette |
摘要 |
An improvement which allows precise positioning of wafers within cassettes in preparation for removal of the wafers by automated equipment. The improvement includes mounting two sawtooth jigs upon the surface upon which the cassette tray is to be placed which extend up into the cassette. Wafers within the cassette rest within the precisely aligned grooves of the sawtooth jigs.
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申请公布号 |
US5149244(A) |
申请公布日期 |
1992.09.22 |
申请号 |
US19910715882 |
申请日期 |
1991.06.17 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WEBBER, HERBERT;EDWARDS, PETER |
分类号 |
H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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