发明名称 FABRICATION OF THIN FILM ELEMENT
摘要 <p>PURPOSE:To realize high integration of thin film elements by employing a printing plate having at least one second printing element section, of such shape as narrower in the printing direction than a first printing element section and recessed with same or deeper depth than the first printing element section, in the printing direction of the first printing element section. CONSTITUTION:A printing plate 401 has a second printing element section recessed deeper than a first printing element section and emulsified matters 404 are captured in the recess of the second printing element section so that spreading of the printing element section in the printing direction E of the second printing element section is minimized. When letterpress printing is employed in patterning requiring pattern resolution of several tens of mum, ink scratched from the first printing element section by means of a squeegee is captured in the recess of the second printing element section so that spreading of the printing element section in the printing direction of the second printing element section is minimized. Consequently, a plurality of printing element sections 406 adjacent each other in the printing direction are separated positively resulting in finer fabrication of thin film element.</p>
申请公布号 JPH04267367(A) 申请公布日期 1992.09.22
申请号 JP19910028443 申请日期 1991.02.22
申请人 SEIKO EPSON CORP 发明人 OZAWA NORIO
分类号 G02F1/136;H01L21/336;H01L27/01;H01L29/78;H01L29/786;H01L29/86;H01L29/861;H05K3/12;H05K3/46 主分类号 G02F1/136
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