发明名称 |
Apparatus and method for detecting missing interconnect material |
摘要 |
Apparatus and method for detecting missing interconnect material. The distance traveled by a bonding tool is measured while the interconnect material is being bonded to a site. Unless it exceeds a predetermined threshold, a signal is generated indicating missing interconnect material. A pivoting system associated mating electrical contacts, and a measurement/comparator are advantageously employed to facilitate this measurement.
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申请公布号 |
US5148967(A) |
申请公布日期 |
1992.09.22 |
申请号 |
US19910729963 |
申请日期 |
1991.07.15 |
申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
GABALDON, JOHN B.;EVANS, JR., DANIEL D.;CAWELTI, DALE W. |
分类号 |
H01L21/60;B23K20/00;H01L21/00 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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