| 摘要 |
PURPOSE:To enhance withstand voltage of an insulation film formed through oxidation of polysilicon and employed as an electrode for capacitor, or the like. CONSTITUTION:A capacitor is formed of a first conductive layer 14, an insulation layer 21 formed through oxidation thereof, and a second conductive layer 15. The first conductive layer 14 is constituted of a first polysilicon layer 14-1, a barrier layer 20 composed of spontaneous oxidation layer and a second polysilicon layer 14-2 wherein the impurity concentration of the first polysilicon layer 14-1 is set higher than that of the second polysilicon layer 14-2. |
