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发明名称
WIRE BONDER
摘要
申请公布号
JPH04267353(A)
申请公布日期
1992.09.22
申请号
JP19910028260
申请日期
1991.02.22
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
MATSUURA KAZUO
分类号
H01L21/607;H01L21/60
主分类号
H01L21/607
代理机构
代理人
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地址
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