THIN-FILM RESISTANCE AND ITS MANUFACTURE

摘要

PURPOSE: To provide a thin film resistor provided with an accurate and reliable value over a wide range and the manufacturing method thereof. CONSTITUTION: A thin film resistor structure trimmable by laser beams and the manufacturing method are disclosed. A pair of electrodes 30 and 32 arranged with an interval on a substrate are in contact with the thin film 28 of a resistive material disposed between them. A trim area 40 arranged by a laser is provided on the inner side of the boundary of the resistive material, and it is provided with a thin and long dimension parallel to the interface of the electrodes 30 and 32/the resistive material 28. The resistive material is covered with a passivation layer 34 and then trimmed.