CHARGED PARTICLE BEAM EXPOSURE DEVICE,申请号JP19910026035-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM EXPOSURE DEVICE
摘要
申请公布号	JPH04264713(A)	申请公布日期	1992.09.21
申请号	JP19910026035	申请日期	1991.02.20
申请人	FUJITSU LTD	发明人	DAIKYO YOSHIHISA;YASUDA HIROSHI
分类号	H01J37/305;H01L21/027	主分类号	H01J37/305
代理机构		代理人
主权项
地址

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