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发明名称
PLASMA SOURCE
摘要
申请公布号
PL292696(A2)
申请公布日期
1992.09.21
申请号
PL19910292696
申请日期
1991.12.10
申请人
MIEDZYRESORTOWE CT NAUKOWE EKS
发明人
MIERNIK KRZYSZTOF
分类号
C23C14/00;C23C14/34;C23C14/54;(IPC1-7):C23C14/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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