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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT TESTING DEVICE
摘要
申请公布号
JPH04264747(A)
申请公布日期
1992.09.21
申请号
JP19910025822
申请日期
1991.02.20
申请人
NEC CORP
发明人
MAEDA TETSUNORI
分类号
G01R31/26;G01R31/28;G01R31/317;H01L21/66;H01L21/82;H01L23/34
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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